The development of superconducting qubit technology has shown great potential for the construction of practical quantum computers. As the complexity of quantum processors continuesto grow, the need for stringent fabrication tolerances becomes increasingly critical. Utilizing advanced industrial fabrication processes could facilitate the necessary level of fabrication control to support the continued scaling of quantum processors. However, these industrial processes are currently not optimized to produce high coherence devices, nor are they a priori compatible with the commonly used approaches to make superconducting qubits. In this work, we demonstrate for the first time superconducting transmon qubits manufactured in a 300 mm CMOS pilot line, using industrial fabrication methods, with resulting relaxation and coherence times already exceeding 100 microseconds. We show across-wafer, large-scale statistics studies of coherence, yield, variability, and aging that confirm the validity of our approach. The presented industry-scale fabrication process, using exclusively optical lithography and reactive ion etching, shows performance and yield similar to the conventional laboratory-style techniques utilizing metal lift-off, angled evaporation, and electron-beam writing. Moreover, it offers potential for further upscaling by including three-dimensional integration and additional process optimization using advanced metrology and judicious choice of processing parameters and splits. This result marks the advent of more reliable, large-scale, truly CMOS-compatible fabrication of superconducting quantum computing processors.
A distributed quantum computing system requires a quantum communication channel between spatially separated processing units. In superconducting circuits, such a channel can be realizedby using propagating microwave photons to encode and transfer quantum information between an emitter and a receiver node. Here we experimentally demonstrate a superconducting circuit that deterministically transfers the state of a data qubit into a propagating microwave mode, with a process fidelity of 94.5%. We use a time-varying parametric drive to shape the temporal profile of the propagating mode to be time-symmetric and with constant phase, so that reabsorption by the receiving processor can be implemented as a time-reversed version of the emission. We demonstrate a self-calibrating routine to correct for time-dependent shifts of the emitted frequencies due to the modulation of the parametric drive. Our work provides a reliable method to implement high-fidelity quantum state transfer and remote entanglement operations in a distributed quantum computing network.
We have integrated single and coupled superconducting transmon qubits into flip-chip modules. Each module consists of two chips – one quantum chip and one control chip –that are bump-bonded together. We demonstrate time-averaged coherence times exceeding 90μs, single-qubit gate fidelities exceeding 99.9%, and two-qubit gate fidelities above 98.6%. We also present device design methods and discuss the sensitivity of device parameters to variation in interchip spacing. Notably, the additional flip-chip fabrication steps do not degrade the qubit performance compared to our baseline state-of-the-art in single-chip, planar circuits. This integration technique can be extended to the realisation of quantum processors accommodating hundreds of qubits in one module as it offers adequate input/output wiring access to all qubits and couplers.
Hosting non-classical states of light in three-dimensional microwave cavities has emerged as a promising paradigm for continuous-variable quantum information processing. Here we experimentallydemonstrate high-fidelity generation of a range of Wigner-negative states useful for quantum computation, such as Schrödinger-cat states, binomial states, Gottesman-Kitaev-Preskill (GKP) states, as well as cubic phase states. The latter states have been long sought after in quantum optics and were never achieved experimentally before. To do so, we use a sequence of interleaved selective number-dependent arbitrary phase (SNAP) gates and displacements. We optimize the state preparation in two steps. First we use a gradient-descent algorithm to optimize the parameters of the SNAP and displacement gates. Then we optimize the envelope of the pulses implementing the SNAP gates. Our results show that this way of creating highly non-classical states in a harmonic oscillator is robust to fluctuations of the system parameters such as the qubit frequency and the dispersive shift.