Fabrication of superconducting through-silicon vias

  1. Justin L. Mallek,
  2. Donna-Ruth W. Yost,
  3. Danna Rosenberg,
  4. Jonilyn L. Yoder,
  5. Gregory Calusine,
  6. Matt Cook,
  7. Rabindra Das,
  8. Alexandra Day,
  9. Evan Golden,
  10. David K. Kim,
  11. Jeffery Knecht,
  12. Bethany M. Niedzielski,
  13. Mollie Schwartz,
  14. Arjan Sevi,
  15. Corey Stull,
  16. Wayne Woods,
  17. Andrew J. Kerman,
  18. and William D. Oliver
Increasing circuit complexity within quantum systems based on superconducting qubits necessitates high connectivity while retaining qubit coherence. Classical micro-electronic systems