We report the observation of omega phase formation in Nb thin films deposited by high-power impulse magnetron sputtering (HiPIMS) for superconducting qubits using transmission electronmicroscopy (TEM). We hypothesize that this phase transformation to the omega phase with hexagonal structure from bcc phase as well as the formation of {111}<112> mechanical twins is induced by internal stress in the Nb thin films. In terms of lateral dimensions, the size of the omega phase of Nb range from 10 to 100 nm, which is comparable to the coherence length of Nb (~40 nm). In terms of overall volume fraction, ~1 vol.% of the Nb grains exhibit this omega phase. We also find that the omega phase in Nb is not observed in large grain Nb samples, suggesting that the phase transition can be suppressed through reducing the grain boundary density, which may serve as a source of strain and dislocations in this system. The current finding may indicate that the Nb thin film is prone to the omega phase transition due to the internal stress in the Nb thin film. We conclude by discussing effects of the omega phase on the superconducting properties of Nb thin films and discussing pathways to mitigate their formation.
We report the first evidence of the formation of niobium hydrides within niobium films on silicon substrates in superconducting qubits fabricated at Rigetti Computing. We combine complementarytechniques including room and cryogenic temperature atomic scale high-resolution and scanning transmission electron microscopy (HR-TEM and STEM), atomic force microscopy (AFM), and the time-of-flight secondary ion mass spectroscopy (TOF-SIMS) to reveal the existence of the niobium hydride precipitates directly in the Rigetti chip areas. Electron diffraction and high-resolution transmission electron microscopy (HR-TEM) analyses are performed at room and cryogenic temperatures (~106 K) on superconducting qubit niobium film areas, and reveal the formation of three types of Nb hydride domains with different crystalline orientations and atomic structures. There is also variation in their size and morphology from small (~5 nm) irregular shape domains within the Nb grains to large (~10-100 nm) Nb grains fully converted to niobium hydride. As niobium hydrides are non-superconducting and can easily change in size and location upon different cooldowns to cryogenic temperatures, our findings highlight a new previously unknown source of decoherence in superconducting qubits, contributing to both quasiparticle and two-level system (TLS) losses, and offering a potential explanation for qubit performance changes upon cooldowns. A pathway to mitigate the formation of the Nb hydrides for superconducting qubit applications is also discussed.