Superconducting microwave resonators are used to study two-level system (TLS) loss in superconducting quantum devices. Fano asymmetry, characterized by a nonzero asymmetry angle ϕin the diameter correction method (DCM), results from the coupling schemes used to measure these devices, including the commonly used hanger method. ϕ is an additional fitting parameter which contains no physically interesting information and can obscure device parameters of interest. The tee-junction symmetry nominally present in these resonator devices provides an avenue for the elimination of Fano asymmetry using calibrated measurement. We show that the eigenvalue associated with the common mode excitation of the resonator is an effective reflection mode (ERM) which has no Fano asymmetry. Our analysis reveals the cause of Fano asymmetry as interference between common and differential modes. Practically, we obtain the ERM from a linear combination of calibrated reflection and transmission measurements. We utilize a 3D aluminum cavity to experimentally demonstrate the validity and flexibility of this model. To extend the usefulness of this symmetry analysis, we apply perturbation theory to recover the ERM in a multiplexed coplanar waveguide resonator device and experimentally demonstrate quantitative agreement in the extracted Q−1i between hanger mode and ERM measurements. We observe a five-fold reduction in uncertainty from the ERM compared to the standard hanger mode at the lowest measured power, -160 dBm delivered to the device. This method could facilitate an increase in throughput of low-power superconducting resonator measurements by up to a factor of 25, as well as allow the extraction of critical parameters from otherwise unfittable device data.
Magnetic impurities are known to degrade superconductivity. For this reason, physical vapor deposition chambers that have previously been used for magnetic materials have generallybeen avoided for making high-quality superconducting resonator devices. In this article, we show by example that such chambers can be used: with Nb films sputtered in a chamber that continues to be used for magnetic materials, we demonstrate compact (3 {\mu}m gap) coplanar waveguide resonators with low-power internal quality factors near one million. We achieve this using a resist strip bath with no post-fabrication acid treatment, which results in performance comparable to previous strip baths with acid treatments. We also find evidence that this improved resist strip bath provides a better surface chemical template for post-fabrication hydrogen fluoride processing. These results are consistent across three Si substrate preparation methods, including a \SI{700}{\celsius} anneal.
This white paper presents a single-layer mask, found at this https URL. It is designed for fabrication of superconducting microwave resonators towards 1:1 comparisons of dielectriclosses from the metal-substrate interface. Finite-element electromagnetic simulations are used to determine participation ratios of the four major regions of the on-chip devices, as well as to confirm lack of crosstalk between neighboring devices and demonstrate coupling tunability over three orders of magnitude. This mask is intended as an open-source community resource for facilitating precise and accurate comparisons of materials in the single-photon, millikelvin regime.
As the field of superconducting quantum computing approaches maturity, optimization of single-device performance is proving to be a promising avenue towards large-scale quantum computers.However, this optimization is possible only if performance metrics can be accurately compared among measurements, devices, and laboratories. Currently such comparisons are inaccurate or impossible due to understudied errors from a plethora of sources. In this Perspective, we outline the current state of error analysis for qubits and resonators in superconducting quantum circuits, and discuss what future investigations are required before superconducting quantum device optimization can be realized.