Low-loss Nb on Si superconducting resonators from a dual-use spintronics deposition chamber and with acid-free post-processing

  1. Maciej W. Olszewski,
  2. Jadrien T. Paustian,
  3. Tathagata Banerjee,
  4. Haoran Lu,
  5. Jorge L. Ramirez,
  6. Nhi Nguyen,
  7. Kiichi Okubo,
  8. Rohit Pant,
  9. Aleksandra B. Biedron,
  10. Daniel C. Ralph,
  11. Christopher J. K. Richardson,
  12. Gregory D. Fuchs,
  13. Corey Rae H McRae,
  14. Ivan V. Pechenezhskiy,
  15. B. L. T. Plourde,
  16. and Valla Fatemi
Magnetic impurities are known to degrade superconductivity. For this reason, physical vapor deposition chambers that have previously been used for magnetic materials have generally