The ability to execute high-fidelity operations is crucial to scaling up quantum devices to large numbers of qubits. However, signal distortions originating from non-linear components in the control lines can limit the performance of single-qubit gates. In this work, we use a measurement based on error amplification to characterize and correct the small single-qubit rotation errors originating from the non-linear scaling of the qubit drive rate with the amplitude of the programmed pulse. With our hardware, and for a 15-ns pulse, the rotation angles deviate by up to several degrees from a linear model. Using purity benchmarking, we find that control errors reach 2×10−4, which accounts for half of the total gate error. Using cross-entropy benchmarking, we demonstrate arbitrary-angle single-qubit gates with coherence-limited errors of 2×10−4 and leakage below 6×10−5. While the exact magnitude of these errors is specific to our setup, the presented method is applicable to any source of non-linearity. Our work shows that the non-linearity of qubit drive line components imposes a limit on the fidelity of single-qubit gates, independent of improvements in coherence times, circuit design, or leakage mitigation when not corrected for.