aluminum (Al/AlOx/Al) parallel-plate capacitors. The size of the resonators is only 0.04 mm2, which is more than one order smaller than the typical size of coplanar resonators (1 mm2). The fabrication method we developed easily fits into the standard superconducting qubits fabrication process. We have obtained capacitance per area 14 fF/μm2 and the internal quality factor 1×103−8×103 at the single-photon level. Our results show that such devices based on Al/AlOx/Al capacitors could be further applied to the qubit readout scheme, including resonators, filters, amplifiers, as well as microwave metamaterials and novel types of qubits, such as 0−π qubit.