Superconducting qubits based on Al/AlOx/Al Josephson junction are one of the most promising candidates for the physical implementation of universal quantum computers. Due to scalabilityand compatibility with the state-of-the-art nanoelectronic processes one can fabricate hundreds of qubits on a single silicon chip. However, decoherence in these systems caused by two-level-systems in amorphous dielectrics, including a tunneling barrier AlOx, is one of the major problems. We report on a Josephson junction thermal annealing process development to crystallize an amorphous barrier oxide (AlOx). The dependences of the thermal annealing parameters on the room temperature resistance are obtained. The developed method allows not only to increase the Josephson junction resistance by 175%, but also to decrease by 60% with precisions of 10% in Rn. Finally, theoretical assumptions about the structure modification in tunnel barrier are proposed. The suggested thermal annealing approach can be used to form a stable and reproducible tunneling barriers and scalable frequency trimming for a widely used fixed-frequency transmon qubits.
Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated usingcoplanar waveguide (CPW) microwave resonators. Here, we report on superconducting CPW microwave resonators with internal quality factors systematically exceeding 5×106 at high powers and 2×106 (with the best value of 4.4×106) at low power. Such performance is demonstrated for 100-nm-thick aluminum resonators with 7-10.5 um center trace on high-resistivity silicon substrates commonly used in quantum Josephson junction circuits. We investigate internal quality factors of the resonators with both dry and wet aluminum etching, as well as deep and isotropic reactive ion etching of silicon substrate. Josephson junction compatible CPW resonators fabrication process with both airbridges and silicon substrate etching is proposed. Finally, we demonstrate the effect of airbridges positions and extra process steps on the overall dielectric losses. The best quality factors are obtained for the wet etched aluminum resonators and isotropically removed substrate with the proposed ultrasonic metal edge microcutting.
The most commonly used physical realization of superconducting qubits for quantum circuits is a transmon. There are a number of superconducting quantum circuits applications, whereJosephson junction critical current reproducibility over a chip is crucial. Here, we report on a robust chip scale Al/AlOx/Al junctions fabrication method due to comprehensive study of shadow evaporation and oxidation steps. We experimentally demonstrate the evidence of optimal Josephson junction electrodes thickness, deposition rate and deposition angle, which ensure minimal electrode surface and line edge roughness. The influence of oxidation method, pressure and time on critical current reproducibility is determined. With the proposed method we demonstrate Al/AlOx/Al junction fabrication with the critical current variation (σ/Ic) less than 3.9% (from 150×200 to 150×600 nm2 area) and 7.7% (for 100×100 nm2 area) over 20×20 mm2 chip. Finally, we fabricate separately three 5×10 mm2 chips with 18 transmon qubits (near 4.3 GHz frequency) showing less than 1.9% frequency variation between qubit on different chips. The proposed approach and optimization criteria can be utilized for a robust wafer-scale superconducting qubit circuits fabrication.
Josephson superconducting qubits and parametric amplifiers are prominent examples of superconducting quantum circuits that have shown rapid progress in recent years. With the growingcomplexity of such devices, the requirements for reproducibility of their electrical properties across a chip have become stricter. Thus, the critical current Ic variation of the Josephson junction, as the most important electrical parameter, needs to be minimized. Critical current, in turn, is related to normal-state resistance the Ambegaokar-Baratoff formula, which can be measured at room temperature. Here, we focus on the dominant source of Josephson junction critical current non-uniformity junction area variation. We optimized Josephson junctions fabrication process and demonstrate resistance variation of 9.8−4.4% and 4.8−2.3% across 22×22 mm2 and 5×10 mm2 chip areas, respectively. For a wide range of junction areas from 0.008 μm2 to 0.12 μm2 we ensure a small linewidth standard deviation of 4 nm measured over 4500 junctions with linear dimensions from 80 to 680 nm. The developed process was tested on superconducting highly coherent transmon qubits (T1>100μs) and a nonlinear asymmetric inductive element parametric amplifier.
We demonstrate non-equilibrium steady-state photon transport through a chain of five coupled artificial atoms simulating the driven-dissipative Bose-Hubbard model. Using transmissionspectroscopy, we show that the system retains many-particle coherence despite being coupled strongly to two open spaces. We show that system energy bands may be visualized with high contrast using cross-Kerr interaction. For vanishing disorder, we observe the transition of the system from the linear to the nonlinear regime of photon blockade in excellent agreement with the input-output theory. Finally, we show how controllable disorder introduced to the system suppresses this non-local photon transmission. We argue that proposed architecture may be applied to analog simulation of many-body Floquet dynamics with even larger arrays of artificial atoms paving an alternative way to demonstration of quantum supremacy
(Martin Leib: The topic of this article is a central theme of my entire work and yet the authors managed to ignore everything I have worked on …)
In this work, we irradiate a superconducting artificial molecule composed of two magnetic-flux-tunable transmons with microwave light while monitoring its state via joint dispersivereadout. At certain fluxes, the molecule demonstrates a complex spectrum deviating qualitatively from the solution of the Schrödinger equation without driving. We reproduce the observed extra spectral lines accurately by numerical simulations, and find them to be a consequence of an Autler-Townes-like effect when a single tone is simultaneously dressing the system and probing the transitions between new eigenstates. We present self-consistent analytical models accounting both these processes at the same time that agree well with both experiment and numerical simulation. This study is an important step towards understanding the behaviour of complex systems of many atoms interacting coherently with strong radiation.