Superconducting Through-Silicon Vias for Quantum Integrated Circuits

  1. Mehrnoosh Vahidpour,
  2. William O'Brien,
  3. Jon Tyler Whyland,
  4. Joel Angeles,
  5. Jayss Marshall,
  6. Diego Scarabelli,
  7. Genya Crossman,
  8. Kamal Yadav,
  9. Yuvraj Mohan,
  10. Catvu Bui,
  11. Vijay Rawat,
  12. Russ Renzas,
  13. Nagesh Vodrahalli,
  14. Andrew Bestwick,
  15. and Chad Rigetti
We describe a microfabrication process for superconducting through-silicon vias appropriate for use in superconducting qubit quantum processors. With a sloped-wall via geometry, we can use non-conformal metal deposition methods such as electron-beam evaporation and sputtering, which reliably deposit high quality superconducting films. Via superconductivity is validated by demonstrating zero via-to-via resistance below the critical temperature of aluminum.
arxiv pdf

leave comment