and memories with reduced error rates and more modes. The complex surface chemistry of niobium however makes identifying the main modes of decoherence difficult at millikelvin temperatures and single-photon powers. We use niobium coaxial quarter-wave cavities to study the impact of etch chemistry, prolonged atmospheric exposure, and the significance of cavity conditions prior to and during cooldown, in particular niobium hydride evolution, on single-photon coherence. We demonstrate cavities with quality factors of Qint≳1.4×109 in the single-photon regime, a 15 fold improvement over aluminum cavities of the same geometry. We rigorously quantify the sensitivity of our fabrication process to various loss mechanisms and demonstrate a 2−4× reduction in the two-level system (TLS) loss tangent and a 3−5× improvement in the residual resistivity over traditional BCP etching techniques. Finally, we demonstrate transmon integration and coherent cavity control while maintaining a cavity coherence of \SI{11.3}{ms}. The accessibility of our method, which can easily be replicated in academic-lab settings, and the demonstration of its performance mark an advancement in 3D cQED.
Niobium coaxial cavities with internal quality factors exceeding 1.5 billion for circuit quantum electrodynamics
Group-V materials such as niobium and tantalum have become popular choices for extending the performance of circuit quantum electrodynamics (cQED) platforms allowing for quantum processors