Josephson junctions form the core circuit element in superconducting quantum computing circuits, single flux quantum digital logic circuits, and sensing devices such as SQUIDs. Aluminumoxide has typically been used as the tunnel barrier. Its formation by exposure to low oxygen pressures at room temperature for short periods of time makes it susceptible to aging and limits the thermal budget of downstream processes. In this paper, we report the first demonstration of {\alpha}-Ta/insulating TaN/a-Ta superconductor/insulator/superconductor Josephson junctions fabricated on 300 mm wafers using CMOS-compatible processes. The junctions were fabricated on high-resistivity silicon substrates using standard processes available at 300 mm scale, including 193 nm optical lithography, ALD of TaN in a cluster tool, and chemical mechanical planarization to enable highly planar interfaces. Junction areas ranging from 0.03 um2 to 9 um2 with ALD TaN thickness between 2 nm and 7 nm were characterized. A critical current density of 76 uA/um2 was observed in junctions using 4 nm ALD TaN in the tunnel barrier. The dependence of Jc on ALD TaN layer thickness is analyzed, and the influence of junction geometry, packaging, and temperature on I-V characteristics is discussed. Junctions were retested after a period of 4 months to quantify junction aging. The potential of this novel material system and a 300 mm superconducting junction process flow to fabricate thermally and environmentally stable junctions is discussed. The vision of a Superconducting Quantum Process Design Kit for a Multi-Project Wafer program to enable rapid development and proliferation of superconducting quantum and digital digital logic systems is presented. This work represents the first step towards establishing such a Quantum Foundry, providing access to high quality qubits and single-flux quantum logic circuits at 300 mm wafer scale.
Interfacing superconducting microwave resonators with optical systems enables sensitive photon detectors, quantum transducers, and related quantum technologies. Achieving high opticalpulse repetition is crucial for maximizing the device throughput. However, light-induced deterioration, such as quasiparticle poisoning, pair-breaking-phonon generation, and elevated temperature, hinders the rapid recovery of superconducting circuits, limiting their ability to sustain high optical pulse repetition rates. Understanding these loss mechanisms and enabling fast circuit recovery are therefore critical. In this work, we investigate the impact of optical illumination on niobium nitride and niobium microwave resonators by immersing them in superfluid helium-4 and demonstrate a three-order-of-magnitude faster resonance recovery compared to vacuum. By analyzing transient resonance responses, we provide insights into light-induced dynamics in these superconductors, highlighting the advantages of niobium-based superconductors and superfluid helium for rapid circuit recovery in superconducting quantum systems integrated with optical fields.
Connecting superconducting quantum processors to telecommunications-wavelength quantum networks is critically necessary to enable distributed quantum computing, secure communications,and other applications. Optically-mediated entanglement heralding protocols offer a near-term solution that can succeed with imperfect components, including sub-unity efficiency microwave-optical quantum transducers. The viability and performance of these protocols relies heavily on the properties of the transducers used: the conversion efficiency, resonator lifetimes, and added noise in the transducer directly influence the achievable entanglement generation rate and fidelity of an entanglement generation protocol. Here, we use an extended Butterworth-van Dyke (BVD) model to optimize the conversion efficiency and added noise of a Thin Film Bulk Acoustic Resonator (FBAR) piezo-optomechanical transducer. We use the outputs from this model to calculate the fidelity of one-photon and two-photon entanglement heralding protocols in a variety of operating regimes. For transducers with matching circuits designed to either minimize the added noise or maximize conversion efficiency, we theoretically estimate that entanglement generation rates of greater than 160kHz can be achieved at moderate pump powers with fidelities of >90%. This is the first time a BVD equivalent circuit model is used to both optimize the performance of an FBAR transducer and to directly inform the design and implementation of an entanglement generation protocol. These results can be applied in the near term to realize quantum networks of superconducting qubits with realistic experimental parameters.
Environmental noise that couples longitudinally to a quantum system dephases that system and can limit its coherence lifetime. Performance using quantum superposition in clocks, informationprocessors, communication networks, and sensors depends on careful state and external field selection to lower sensitivity to longitudinal noise. In many cases time varying external control fields–such as the Hahn echo sequence originally developed for nuclear magnetic resonance applications–can passively correct for longitudinal errors. There also exist continuous versions of passive correction called continuous dynamical decoupling (CDD), or spin-locking depending on context. However, treating quantum systems under CDD as qubits has not been well explored. Here, we develop universal single-qubit gates that are „fast“ relative to perturbative Rabi gates and applicable to any CDD qubit architecture. We demonstrate single-qubit gates with fidelity =0.9947(1) on a frequency tunable CDD transmon superconducting circuit operated where it is strongly sensitive to longitudinal noise, thus establishing this technique as a potentially useful tool for operating qubits in applications requiring high fidelity under non-ideal conditions.