Josephson junctions form the core circuit element in superconducting quantum computing circuits, single flux quantum digital logic circuits, and sensing devices such as SQUIDs. Aluminumoxide has typically been used as the tunnel barrier. Its formation by exposure to low oxygen pressures at room temperature for short periods of time makes it susceptible to aging and limits the thermal budget of downstream processes. In this paper, we report the first demonstration of {\alpha}-Ta/insulating TaN/a-Ta superconductor/insulator/superconductor Josephson junctions fabricated on 300 mm wafers using CMOS-compatible processes. The junctions were fabricated on high-resistivity silicon substrates using standard processes available at 300 mm scale, including 193 nm optical lithography, ALD of TaN in a cluster tool, and chemical mechanical planarization to enable highly planar interfaces. Junction areas ranging from 0.03 um2 to 9 um2 with ALD TaN thickness between 2 nm and 7 nm were characterized. A critical current density of 76 uA/um2 was observed in junctions using 4 nm ALD TaN in the tunnel barrier. The dependence of Jc on ALD TaN layer thickness is analyzed, and the influence of junction geometry, packaging, and temperature on I-V characteristics is discussed. Junctions were retested after a period of 4 months to quantify junction aging. The potential of this novel material system and a 300 mm superconducting junction process flow to fabricate thermally and environmentally stable junctions is discussed. The vision of a Superconducting Quantum Process Design Kit for a Multi-Project Wafer program to enable rapid development and proliferation of superconducting quantum and digital digital logic systems is presented. This work represents the first step towards establishing such a Quantum Foundry, providing access to high quality qubits and single-flux quantum logic circuits at 300 mm wafer scale.
Interfacing superconducting microwave resonators with optical systems enables sensitive photon detectors, quantum transducers, and related quantum technologies. Achieving high opticalpulse repetition is crucial for maximizing the device throughput. However, light-induced deterioration, such as quasiparticle poisoning, pair-breaking-phonon generation, and elevated temperature, hinders the rapid recovery of superconducting circuits, limiting their ability to sustain high optical pulse repetition rates. Understanding these loss mechanisms and enabling fast circuit recovery are therefore critical. In this work, we investigate the impact of optical illumination on niobium nitride and niobium microwave resonators by immersing them in superfluid helium-4 and demonstrate a three-order-of-magnitude faster resonance recovery compared to vacuum. By analyzing transient resonance responses, we provide insights into light-induced dynamics in these superconductors, highlighting the advantages of niobium-based superconductors and superfluid helium for rapid circuit recovery in superconducting quantum systems integrated with optical fields.
Environmental noise that couples longitudinally to a quantum system dephases that system and can limit its coherence lifetime. Performance using quantum superposition in clocks, informationprocessors, communication networks, and sensors depends on careful state and external field selection to lower sensitivity to longitudinal noise. In many cases time varying external control fields–such as the Hahn echo sequence originally developed for nuclear magnetic resonance applications–can passively correct for longitudinal errors. There also exist continuous versions of passive correction called continuous dynamical decoupling (CDD), or spin-locking depending on context. However, treating quantum systems under CDD as qubits has not been well explored. Here, we develop universal single-qubit gates that are „fast“ relative to perturbative Rabi gates and applicable to any CDD qubit architecture. We demonstrate single-qubit gates with fidelity =0.9947(1) on a frequency tunable CDD transmon superconducting circuit operated where it is strongly sensitive to longitudinal noise, thus establishing this technique as a potentially useful tool for operating qubits in applications requiring high fidelity under non-ideal conditions.
Superconducting systems have a long history of use in experiments that push the frontiers of mechanical sensing. This includes both applied and fundamental research, which at presentday ranges from quantum computing research and efforts to explore Planck-scale physics to fundamental studies on the nature of motion and the quantum limits on our ability to measure it. In this paper, we first provide a short history of the role of superconducting circuitry and devices in mechanical sensing, focusing primarily on efforts in the last decade to push the study of quantum mechanics to include motion on the scale of human-made structures. This background sets the stage for the remainder of the paper, which focuses on the development of quantum electromechanical systems (QEMS) that incorporate superconducting quantum bits (qubits), superconducting transmission line resonators and flexural nanomechanical elements. In addition to providing the motivation and relevant background on the physical behavior of these systems, we discuss our recent efforts to develop a particular type of QEMS that is based upon the Cooper-pair box (CPB) and superconducting coplanar waveguide (CPW) cavities, a system which has the potential to serve as a testbed for studying the quantum properties of motion in engineered systems.