Nanometric constrictions in superconducting coplanar waveguide resonators
We report on the design, fabrication and characterization of superconducting coplanar waveguide resonators with nanometric constrictions. By reducing the size of the center line down to 50 nm, the RF currents are concentrated into a small cross section and the magnetic field in its vicinity is increased. The device characteristics are only slightly modified by the constrictions, with changes in resonance frequency lower than 1% and changes in transmission and Q-factor lower than 20%. These devices could enable the achievement of higher couplings to small magnetic samples or even to single molecular spins and have applications in circuit quantum electrodynamics, quantum computing and electron paramagnetic resonance.