2.5D circuit quantum electrodynamics

Experimental quantum information processing with superconducting circuits is rapidly advancing, driven by innovation in two classes of devices, one involving planar micro-fabricated (2D) resonators, and the other involving machined three-dimensional (3D) cavities. We demonstrate that circuit quantum electrodynamics (cQED), which is based on the interaction of low-loss resonators and qubits, can be implemented in a multilayer superconducting structure, which combines 2D and 3D advantages, hence its nickname „2.5.“ We employ standard micro-fabrication techniques to pattern each layer, and rely on a vacuum gap between the layers to store the electromagnetic energy. Planar superconducting qubits are lithographically defined as an aperture in a conducting boundary of multilayer resonators, rather than as a separate metallic structure on an insulating substrate. In order to demonstrate the potential of these design principles, we implemented an integrated, two-cavity-modes, one-transmon-qubit system for cQED experiments. The measured coherence times and coupling energies suggest that the 2.5D platform would be a promising base for integrated quantum information processing.