We present the design and experimental characterization of a kinetic-inductance traveling-wave parametric amplifier (KI-TWPA) for sub-GHz frequencies. KI-TWPAs amplify signals throughnonlinear mixing processes supported by the nonlinear kinetic inductance of a superconducting transmission line. The device described here utilizes a compactly meandered TiN microstrip transmission line to achieve the length needed to amplify sub-GHz signals. It is operated in a frequency translating mode where the amplified signal tone is terminated at the output of the amplifier, and the idler tone at approximately 2.5~GHz is brought out of the cryostat. By varying the pump frequency, a gain of up to 22 dB was achieved in a tunable range from about 450 to 850~MHz. Use of TiN as the nonlinear element allows for a reduction of the required pump power by roughly an order of magnitude relative to NbTiN, which has been used for previous KI-TWPA implementations. This amplifier has the potential to enable high-sensitivity and high-speed measurements in a wide range of applications, such as quantum computing, astrophysics, and dark matter detection.
Kinetic inductance traveling-wave parametric amplifiers (KI-TWPA) have a wide instantaneous bandwidth with near quantum-limited sensitivity and a relatively high dynamic range. Becauseof this, they are suitable readout devices for cryogenic detectors and superconducting qubits and have a variety of applications in quantum sensing. This work discusses the design, fabrication, and performance of a KI-TWPA based on four-wave mixing in a NbTiN microstrip transmission line. This device amplifies a signal band from 4 to 8~GHz without contamination from image tones, which are produced in a separate higher frequency band. The 4 – 8~GHz band is commonly used to read out cryogenic detectors, such as microwave kinetic inductance detectors (MKIDs) and Josephson junction-based qubits. We report a measured maximum gain of over 20 dB using four-wave mixing with a 1-dB gain compression point of -58 dBm at 15 dB of gain over that band. The bandwidth and peak gain are tunable by adjusting the pump-tone frequency and power. Using a Y-factor method, we measure an amplifier-added noise of 0.5≤Nadded≤1.5 photons from 4.5 – 8 GHz.
This study presents a comprehensive investigation into the exceptional superconducting attributes of titanium nitride (TiN) achieved through plasma-enhanced atomic layer deposition(PEALD) on both planar and intricate three-dimensional (3D) structures. We introduced an additional substrate biasing cycle to densify the film and remove ligand residues, augmenting the properties while minimizing impurities. While reactive-sputtered TiN films exhibit high quality, our technique ensures superior uniformity by consistently maintaining a desired sheet resistance greater than 95 percent across a 6inch wafer, a critical aspect for fabricating extensive arrays of superconducting devices and optimizing wafer yield. Moreover, our films demonstrate exceptional similarity to conventional reactive-sputtered films, consistently reaching a critical temperature (Tc) of 4.35 K with a thickness of around 40 nm. This marks a notable achievement compared to previously reported ALD-based superconducting TiN. Using the same process as for planar films, we obtained Tc for aspect ratios (ARs) ranging from 2 to 40, observing a Tc of approximately 2 K for ARs between 2 and 10.5. We elucidate the mechanisms contributing to the limitations and degradation of superconducting properties over these aggressive 3D structures. Our results seamlessly align with both current and next-generation superconducting technologies, meeting stringent criteria for thin-film constraints, large-scale deposition, conformality, 3D integration schemes, and yield optimization.
Superconducting qubits are widely used in quantum computing research and industry. We describe a superconducting kinetic inductance qubit (Kineticon) operating at W-band frequencieswith a nonlinear nanowire section that provides the anharmonicity required for two distinct quantum energy states. Operating the qubits at higher frequencies relaxes the dilution refrigerator temperature requirements for these devices and paves the path for multiplexing a large number of qubits. Millimeter-wave operation requires superconductors with relatively high Tc, which implies high gap frequency, 2Δ/h, beyond which photons break Cooper pairs. For example, NbTiN with Tc=16K has a gap frequency near 1.4 THz, which is much higher than that of aluminum (90 GHz), allowing for operation throughout the millimeter-wave band. Here we describe a design and simulation of a W-band Kineticon qubit embedded in a 3-D cavity.