Superinductors are circuit elements characterised by an intrinsic impedance in excess of the superconducting resistance quantum (RQ≈6.45 kΩ), with applications from metrology andsensing to quantum computing. However, they are typically obtained using exotic materials with high density inductance such as Josephson junctions, superconducting nanowires or twisted two-dimensional materials. Here, we present a superinductor realised within a silicon integrated circuit (IC), exploiting the high kinetic inductance (∼1~nH/◻) of TiN thin films native to the manufacturing process (22-nm FDSOI). By interfacing the superinductor to a silicon quantum dot formed within the same IC, we demonstrate a radio-frequency single-electron transistor (rfSET), the most widely used sensor in semiconductor-based quantum computers. The integrated nature of the rfSET reduces its parasitics which, together with the high impedance, yields a sensitivity improvement of more than two orders of magnitude over the state-of-the-art, combined with a 10,000-fold area reduction. Beyond providing the basis for dense arrays of integrated and high-performance qubit sensors, the realization of high-kinetic-inductance superconducting devices integrated within modern silicon ICs opens many opportunities, including kinetic-inductance detector arrays for astronomy and the study of metamaterials and quantum simulators based on 1D and 2D resonator arrays.
A long-lived multi-mode qubit register is an enabling technology for modular quantum computing architectures. For interfacing with superconducting qubits, such a quantum memory shouldbe able to store incoming quantum microwave fields at the single-photon level for long periods of time, and retrieve them on-demand. Here, we demonstrate the partial absorption of a train of weak microwave fields in an ensemble of bismuth donor spins in silicon, their storage for 100 ms, and their retrieval, using a Hahn-echo-like protocol. The long storage time is obtained by biasing the bismuth donors at a clock transition. Phase coherence and quantum statistics are preserved in the storage.
Although vacuum fluctuations appear to represent a fundamental limit to the sensitivity of electromagnetic field measurements, it is possible to overcome them by using so-called squeezedstates. In such states, the noise in one field quadrature is reduced below the vacuum level while the other quadrature becomes correspondingly more noisy, as required by Heisenberg’s uncertainty principle. Squeezed optical fields have been proposed and demonstrated to enhance the sensitivity of interferometric measurements beyond the photon shot-noise limit, with applications in gravitational wave detection. They have also been used to increase the sensitivity of atomic absorption spectroscopy, imaging, atom-based magnetometry, and particle tracking in biological systems. At microwave frequencies, cryogenic temperatures are required for the electromagnetic field to be in its vacuum state. Squeezed microwaves have been produced, used for fundamental studies of light-matter interaction and for enhanced sensing of a mechanical resonator, and proposed to enhance the sensitivity of the readout of superconducting qubits. Here we report the use of squeezed microwave fields to enhance the sensitivity of magnetic resonance spectroscopy of an ensemble of electronic spins. Our scheme consists in sending a squeezed vacuum state to the input of a cavity containing the spins while they are emitting an echo, with the phase of the squeezed quadrature aligned with the phase of the echo. We demonstrate a total noise reduction of 1.2\,dB at the spectrometer output due to the squeezing. These results provide a motivation to examine the application of the full arsenal of quantum metrology to magnetic resonance detection.