We demonstrate a substantial reduction in two-level system loss in tantalum coplanar waveguide resonators fabricated on high-resistivity silicon substrates through the use of an ultrathintitanium sacrificial layer. A 0.2nm titanium film, deposited atop pre-sputtered {\alpha}-tantalum, acts as a solid-state oxygen getter that chemically modifies the native Ta oxide at the metal-air interface. After device fabrication, the titanium layer is removed using buffered oxide etchant, leaving behind a chemically reduced Ta oxide surface. Subsequent high-vacuum annealing further suppresses two-level system loss. Resonators treated with this process exhibit internal quality factors Qi exceeding an average of 1.5 million in the single-photon regime across ten devices, over three times higher than otherwise identical devices lacking the titanium layer. These results highlight the critical role of interfacial oxide chemistry in superconducting loss and reinforce atomic-scale surface engineering as an effective approach to improving coherence in tantalum-based quantum circuits. The method is compatible with existing fabrication workflows applicable to tantalum films, offering a practical route to further extending T1 lifetimes in superconducting qubits.
Electromagnetic simulations form an indispensable part of the design and optimization process for superconducting quantum devices. Although several commercial platforms exist, open-sourcealternatives optimized for high-performance computing remain limited. To address this gap, we introduce SQDMetal, a Python-based API that integrates Qiskit Metal (IBM), Gmsh, Palace (AWS), and Paraview (Kitware) into an open-source, highly parallel simulation workflow for superconducting quantum circuits. SQDMetal enables accurate, efficient, and scalable simulations while remaining community-driven and free from commercial constraints. In this work, we validate SQDMetal through mesh convergence studies which benchmark SQDMetal against COMSOL Multiphysics and Ansys, demonstrating excellent agreement for both eigenmode and electrostatic (capacitance) simulations. Furthermore, we simulate superconducting resonators and transmon qubits, showing reasonable agreement with experimental measurements. SQDMetal also supports advanced capabilities, including Hamiltonian extraction via the energy participation ratio (EPR) method, incorporation of kinetic inductance effects, and full 3D modelling of device geometry for improved predictive accuracy. By unifying open-source tools into a single framework, SQDMetal lowers the barriers to entry for community members seeking to access high-performance simulations to assist in the design and optimization of their devices.