We present an experimental approach for cryogenic dielectric measurements on ultra-thin insulating films. Based on a coplanar microwave waveguide design we implement superconductingquarter-wave resonators with inductive coupling, which allows us to determine the real part ε1 of the dielectric function at GHz frequencies and for sample thicknesses down to a few nm. We perform simulations to optimize resonator coupling and sensitivity, and we demonstrate the possibility to quantify ε1 with a conformal mapping technique in a wide sample-thickness and ε1-regime. Experimentally we determine ε1 for various thin-film samples (photoresist, MgF2, and SiO2) in the thickness regime of nm up to μm. We find good correspondence with nominative values and we identify the precision of the film thickness as our predominant error source. Additionally we demonstrate a measurement of ε1(T) vs. temperature for a SrTiO3 bulk sample, using an in-situ reference method to compensate for the temperature dependence of the superconducting resonator properties.
We have fabricated and investigated a stacked two-chip device, consisting of a lumped element resonator on one chip, which is side-coupled to a coplanar waveguide transmission lineon a second chip. We present a full model to predict the behavior of the device dependent on the position of the lumped element resonator with respect to the transmission line. We identify different regimes, in which the device can be operated. One of them can be used to tune the coupling between the two subsystems. Another regime enables frequency tunability of the device, without leaving the over-coupled limit for internal quality factors of about 10^4, while in the last regime the resonator properties are insensitive against small variations of the position. Finally, we have measured the transmission characteristics of the resonator for different positions, demonstrating a good agreement with the model.
We experimentally investigate superconducting coplanar waveguide resonators in external magnetic fields and present two strategies to reduce field-induced dissipation channels and resonancefrequency shifts. One of our approaches is to significantly reduce the superconducting ground-plane areas, which leads to reduced magnetic field-focussing and thus to lower effective magnetic fields inside the waveguide cavity. By this measure, the field-induced losses can be reduced by more than one order of magnitude in mT out-of-plane magnetic fields. When these resonators are additionally coupled inductively instead of capacitively to the microwave feedlines, an intrinsic closed superconducting loop is effectively shielding the heart of the resonator from magnetic fields by means of flux conservation. In total, we achieve a reduction of the field-induced resonance frequency shift by up to two orders of magnitude. We combine systematic parameter variations on the experimental side with numerical magnetic field calculations to explain the effects of our approaches and to support our conclusions. The presented results are relevant for all areas, where high-performance superconducting resonators need to be operated in magnetic fields, e.g. for quantum hybrid devices with superconducting circuits or electron spin resonance detectors based on coplanar waveguide cavities.