Correlating the nanostructure of Al-oxide with deposition conditions and dielectric contributions of two-level systems in perspective of superconducting quantum circuits

  1. S. Fritz,
  2. A. Seiler,
  3. L. Radtke,
  4. R. Schneider,
  5. M. Weides,
  6. G. Weiss,
  7. and D. Gerthsen
This work is concerned with Al/Al-oxide(AlOx)/Al-layer systems which are important for Josephson-junction-based superconducting devices such as quantum bits. The device performance
is limited by noise, which has been to a large degree assigned to the presence and properties of two-level tunneling systems in the amorphous AlOx tunnel barrier. The study is focused on the correlation of the fabrication conditions, nanostructural and nanochemical properties and the occurrence of two-level tunneling systems with particular emphasis on the AlOx-layer. Electron-beam evaporation with two different processes and sputter deposition were used for structure fabrication, and the effect of illumination by ultraviolet light during Al-oxide formation is elucidated. Characterization was performed by analytical transmission electron microscopy and low-temperature dielectric measurements. We show that the fabrication conditions have a strong impact on the nanostructural and nanochemical properties of the layer systems and the properties of two-level tunneling systems. Based on the understanding of the observed structural characteristics, routes are derived towards the fabrication of Al/AlOx/Al-layers systems with improved properties.

Probing the TLS Density of States in SiO Films using Superconducting Lumped Element Resonators

  1. S. T. Skacel,
  2. Ch. Kaiser,
  3. S. Wuensch,
  4. H. Rotzinger,
  5. A. Lukashenko,
  6. M. Jerger,
  7. G. Weiss,
  8. M. Siegel,
  9. and A. V. Ustinov
We have investigated dielectric losses in amorphous SiO thin films under operating conditions of superconducting qubits (mK temperatures and low microwave powers). For this purpose,
we have developed a broadband measurement setup employing multiplexed lumped element resonators using a broadband power combiner and a low-noise amplifier. The measured temperature and power dependences of the dielectric losses are in good agreement with those predicted for atomic two-level tunneling systems (TLS). By measuring the losses at different frequencies, we found that the TLS density of states is energy dependent. This had not been seen previously in loss measurements. These results contribute to a better understanding of decoherence effects in superconducting qubits and suggest a possibility to minimize TLS-related decoherence by reducing the qubit operation frequency.